Huttinger B38-0021 RF Matching Network Component

Technical Specifications

Model：B38-0021 Brand：Huttinger Product Type: RF matching network spare component

Module Feature

Huttinger B38-0021 is a precision spare component for Huttinger RF matching network. It is matched with Huttinger RF generators to realize impedance matching between RF power source and plasma load. It stabilizes RF power transmission, reduces reflected power, ensures continuous and stable plasma state inside vacuum chamber. Widely used in semiconductor plasma etching, PVD, CVD and vacuum coating equipment. Working principle: RF impedance matching auxiliary component Application frequency: 13.56MHz Onboard components: High frequency passive parts, insulated mounting base, connecting terminals

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, high frequency impedance inspection

Programming software

No dedicated software required

Electrical Parameters

Working voltage: High frequency RF voltage Application: Matched with Huttinger RF generator system

Mechanical & Structure

Mounting: Installed inside RF matching cabinet Protection class: IP20

Environmental

Operating temperature: 10℃ ~ +45℃ Ambient humidity: 5~85% non-condensing Certification: CE Status: Huttinger RF matching spare component

System compatibility

B38-0021 fits Huttinger TIG series RF generator and corresponding matching network, applied for semiconductor vacuum plasma processing system.

Function

B38-0021 is RF matching network spare part made by Huttinger. It assists the matching box to adjust the system impedance, minimize reflected power, maximize power delivery to plasma load. High-frequency insulation and anti-high voltage design adapt to harsh vacuum plasma workshop environment. It is important spare part for RF matching unit maintenance.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open matching network cabinet, replace the old component. Check connection terminals and insulation clearance. Close cabinet, restore power, run RF matching test and reflected power inspection.

Interface

High voltage RF connecting terminals, fixed mounting holes, no LED indicators on B38-0021.

Diagnostic

High reflected power: Damaged component or poor terminal contact. RF matching failure: Component aging or insulation breakdown. Abnormal heat: Loose connection or component deterioration.

Product Brief

B38-0021 Huttinger RF matching network spare component,used together with TIG series RF generator for semiconductor vacuum plasma coating and etching equipment maintenance,RF matching spare.