Huttinger PFM1500A RF Generator

Technical Specifications

Model：PFM1500A Brand：Huttinger Product Type: 1500W RF generator

Module Feature

Huttinger PFM1500A is high performance 1500W RF generator designed for semiconductor plasma process equipment. It outputs stable 13.56MHz RF power and works with matching network for plasma etching and PVD coating. Built-in multi-protection functions and local/remote control interface. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: RF power generation Application frequency:13.56MHz Onboard components: RF power amplifier, control unit, protection circuit, power and signal connecting terminals

LED indicators

Equipped with status LED indicators

Hardware self-diagnosis

RF output power test, insulation resistance test, reflected power inspection, alarm function test

Programming software

Huttinger service software for parameter configuration and fault diagnosis

Electrical Parameters

Input voltage: 230V AC Output power:1500W Application: Semiconductor plasma process

Mechanical & Structure

Mounting: Rack mount installation Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger RF generator

System compatibility

PFM1500A is compatible with Huttinger matching network for semiconductor vacuum plasma processing equipment.

Function

PFM1500A is 13.56MHz RF generator manufactured by Huttinger. It provides 1500W continuous RF power for vacuum plasma process. It supports automatic impedance matching to reduce reflected power. It has overvoltage, overcurrent, overheat and reflected power protection. It supports local panel control and remote communication control. It is core equipment for semiconductor thin film coating and etching.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Install the RF generator into equipment rack. Connect AC power cable, RF coaxial cable and control signal cable. Check wiring terminals and insulation clearance. Restore power, run power output test and alarm inspection.

Interface

50Ω RF coaxial output port, AC power terminals, signal communication ports, fixed mounting holes on PFM1500A.

Diagnostic

No RF output: Power supply fault, interlock trigger or cable damage. High reflected power: Impedance mismatch or coaxial cable defect. Overheat alarm: Insufficient cooling or internal component failure.

Product Brief

PFM1500A Huttinger 1500W 13.56MHz RF generator,used for semiconductor vacuum plasma coating and etching process,RF power source.