Huttinger TE1658644 Processor Module

Technical Specifications

Model：TE1658644 Brand：Huttinger Product Type: RF generator digital processor module

Module Feature

Huttinger TE1658644 is high performance digital processor module for Huttinger SSM3000 RF power supply. It executes RF power closed-loop regulation, impedance calculation, interlock logic and host communication. It cooperates with RF amplifier and protection circuits. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: Digital signal processing Application frequency:13.56MHz Onboard components: Microprocessor unit, signal sampling circuit, communication interface, multi-channel connectors

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, signal waveform inspection, communication port test

Programming software

Huttinger service software for parameter setup and fault log reading

Electrical Parameters

Working voltage:24VDC auxiliary power Application: Matched with Huttinger SSM3000 RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger processor module

System compatibility

TE1658644 is compatible with Huttinger SSM3000 RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

TE1658644 is core processor module manufactured by Huttinger. It collects forward and reflected RF power signals, calculates impedance and stabilizes RF power output. It handles safety interlock and remote communication commands for plasma process recipes. Anti-high-frequency interference design adapts to harsh electromagnetic environment inside RF cabinet. It is essential spare part for SSM3000 RF generator overhaul.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old processor module. Check connector terminals and insulation clearance. Close cabinet, restore power, run communication and RF power test.

Interface

Multi-pin backplane connectors, fixed mounting holes, no LED indicators on TE1658644.

Diagnostic

No RF power regulation: Processor module fault or communication failure. Impedance matching failure: Sampling circuit damage or module firmware error. Remote communication loss: Damaged signal port.

Product Brief

TE1658644 Huttinger SSM3000 RF generator processor module,used for semiconductor vacuum plasma coating and etching equipment maintenance,processor spare part.