Huttinger TE991290 RF Control Board

Technical Specifications

Model：TE991290 Brand：Huttinger Product Type: RF generator control circuit board

Module Feature

Huttinger TE991290 is precision control circuit board designed for Huttinger RF power supply system. It cooperates with Huttinger TIG series RF generator to realize RF power closed-loop regulation and signal monitoring. It helps maintain stable plasma status and reduce system failure rate. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: RF signal control and processing Application frequency:13.56MHz Onboard components: Microprocessor, signal sampling chips, drive circuit, connecting terminals

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, signal waveform inspection

Programming software

Huttinger service software for parameter setup and fault diagnosis

Electrical Parameters

Working voltage: 24VDC auxiliary power Application: Matched with Huttinger TIG series RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger RF control board spare component

System compatibility

TE991290 is compatible with Huttinger TIG series RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

TE991290 is RF control board manufactured by Huttinger. It samples RF power and reflected power signal, adjusts amplifier output to keep stable RF power delivery. Anti-interference circuit design adapts to high-frequency electromagnetic environment inside RF cabinet. It is essential spare for RF generator maintenance.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old control board. Check wiring terminals and insulation clearance. Close cabinet, restore power, run RF output test and alarm inspection.

Interface

Signal connecting terminals, fixed mounting holes, no LED indicators on TE991290.

Diagnostic

No RF output: Damaged control board or loose signal wiring. Unstable RF power: Board component aging or signal sampling failure. Interlock alarm: Wrong board version or communication abnormality.

Product Brief

TE991290 Huttinger RF generator control board,matched with TIG series RF generator,used for semiconductor vacuum plasma coating and etching equipment maintenance,RF control spare part.