Huttinger TPFH-1489315-04 RF Power Module

Technical Specifications

Model：TPFH-1489315-04 Brand：Huttinger Product Type: RF generator power module

Module Feature

Huttinger TPFH-1489315-04 is high performance RF power module designed for Huttinger RF power supply system. It undertakes RF power amplification and power conversion. It features high frequency stability and anti-interference performance. Widely applied in semiconductor PVD, CVD and plasma etching vacuum equipment. Working principle: RF power amplification Application frequency:13.56MHz Onboard components: Power transistor, high-frequency matching parts, filter unit, connecting terminals

LED indicators

Not equipped

Hardware self-diagnosis

Continuity test, insulation resistance test, power output waveform inspection

Programming software

No dedicated software required

Electrical Parameters

Working voltage: High frequency RF voltage Application: Matched with Huttinger TIG and PFM series RF generator

Mechanical & Structure

Mounting: Installed inside RF generator cabinet Protection class: IP20

Environmental

Operating temperature:10℃ ~ +45℃ Ambient humidity:5~85% non-condensing Certification: CE Status: Huttinger power module

System compatibility

TPFH-1489315-04 is compatible with Huttinger TIG and PFM series RF generator and matching network for semiconductor vacuum plasma processing equipment.

Function

TPFH-1489315-04 is RF power module manufactured by Huttinger. It amplifies the low-power RF signal into high-power RF output for plasma process. Built-in over-current and over-temperature protection. Designed to withstand harsh high-frequency electromagnetic environment inside RF cabinet. It is key spare part for RF generator overhaul.

Installation

Follow lockout/tagout safety procedure before installation. Cut off all power and discharge high voltage components. Open RF generator cabinet, replace the old power module. Check connector terminals and insulation clearance. Close cabinet, restore power, run RF power output test and alarm inspection.

Interface

High-frequency power connectors, fixed mounting holes, no LED indicators on TPFH-1489315-04.

Diagnostic

No RF power output: Damaged power module or loose high-frequency connector. RF power attenuation: Aging power transistor or poor thermal contact. Over-temperature alarm: Cooling failure or module internal short circuit.

Product Brief

TPFH-1489315-04 Huttinger RF generator power module,matched with TIG and PFM series RF generator,used for semiconductor vacuum plasma coating and etching equipment maintenance,power module spare part.