ZYGO 7702 Heterodyne Laser Head

Technical Specifications

Model:7702

Brand:ZYGO

Product type:Heterodyne HeNe Laser Head

Power supply:24V DC

Laser type:He-Ne dual-frequency heterodyne laser

Output wavelength:632.8 nm

Optical output power:＞400µW

Frequency difference:20 MHz ±1600 Hz

Beam diameter:3mm / 6mm optional

Polarization:Orthogonal linear polarization

Warm-up time:≤15 minutes

Weight:1.4kg

Onboard indicator:Laser power indicator,fault alarm LED

Operating temperature:10℃ ~ +40℃

Storage temperature:-40℃ ~ +65℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

7702 belongs to ZYGO ZMI series heterodyne laser head.

Compatible with ZMI-2001,ZMI-2002,ZMI-4104 VME interferometer measurement boards.

Mainly applied for semiconductor lithography equipment,precision motion stage and optical metrology systems.

Commonly used for old precision equipment maintenance and spare replacement.

Function

Dual-frequency He-Ne laser source for ZYGO ZMI laser interferometer measurement system.

Generate stable 20MHz frequency difference heterodyne laser beam for displacement interferometry measurement.

Output collimated laser beam,can connect optical fiber to transmit signal to interferometer optical path.

Real-time laser power monitoring,trigger alarm while optical power attenuation.

Cooperate with ZMI series VME acquisition board to realize sub-nanometer displacement measurement.

Support hardware self-test of laser tube and power supply circuit,fault state displayed via LED indicator.

Installation

Power off the whole metrology system.

Mount laser head on vibration isolation bracket.

Connect 24V DC power cable.

Connect optical path or fiber cable between laser head and interferometer.

Power on and wait for warm-up period,check laser power LED status.

Complete optical path alignment and system calibration.

Interface

DC power connector,optical beam output port,status signal port,LED indicators.

Feature

ZYGO ZMI series 7702 heterodyne HeNe laser head.

Stable dual-frequency 20MHz laser output,matched with ZMI VME measurement boards.

Orthogonal linear polarized beam,ideal for multi-axis interferometer measurement.

Built-in power monitoring circuit to detect laser aging.

Discontinued obsolete optical module,supply only for old precision equipment spare replacement.

Vibration resistant mechanical structure,suitable for precision metrology cabinet.

Diagnostic

LED alarm on:laser tube aging,power supply abnormality;

No laser output:check 24V power wiring and laser tube health;

Low optical power warning:laser tube attenuation,optical path contamination;

Measurement data jitter:insufficient warm-up,poor vibration isolation or optical path reflection interference.

Product Brief

ZYGO 7702 is heterodyne He-Ne laser head for ZMI laser interferometer system.

It provides stable dual-frequency laser source for ultra-precision displacement measurement,widely used as spare part for semiconductor lithography platform and optical metrology equipment renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.