ZYGO 8070-0902-03X Heterodyne Laser Head ZMI-7705

Technical Specifications

Model:ZMI-7705,Part No:8070-0902-03X

Brand:ZYGO

Product type:Heterodyne HeNe Laser Head

Power supply:±15V & +5V DC

Laser type:He-Ne dual-frequency heterodyne laser

Output wavelength:632.8 nm

Optical output power:＞600µW

Frequency difference:20 MHz ±1600 Hz

Beam diameter:6mm

Polarization:Orthogonal linear polarization

Built-in optical isolator:30dB typical

Warm-up time:≤25 minutes to full stability

Weight:1.45kg

Operating temperature:10℃ ~ +40℃

Storage temperature:-40℃ ~ +65℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

8070-0902-03X belongs to ZYGO ZMI series heterodyne laser head,model ZMI-7705.

Compatible measurement electronics:ZMI-501,ZMI-501A.

Work together with ZMI fiber optical pickup heads.

Designed for precision stage displacement metrology in semiconductor lithography equipment.

Commonly used for old precision equipment maintenance and spare replacement.

Function

ZMI-7705 laser head provides dual-frequency He-Ne laser source for ZMI heterodyne laser interferometer system.

Generate stable 20MHz frequency difference heterodyne laser beam for displacement interferometry measurement.

Output collimated laser beam,support optical fiber coupling to transmit signal to interferometer optical path.

Real-time laser power monitoring,trigger alarm while optical power attenuation.

Cooperate with ZMI measurement module to realize sub-nanometer displacement measurement.

Built-in optical isolator to reduce reflected light interference and protect laser tube.

Support hardware self-test of laser tube and power supply circuit,fault state displayed via LED indicator.

Installation

Power off the whole metrology system.

Mount laser head on vibration isolation bracket.

Connect ±15V & +5V DC power cable.

Connect optical path or fiber cable between laser head and optical pickup.

Power on and wait for warm-up period,check laser power LED status.

Complete optical path alignment and system calibration.

Verify position reading stability after configuration.

Interface

DC power connector,BNC RF beat output port,optical beam output port,interlock & status signal port,LED indicators.

Feature

ZYGO part number 8070-0902-03X,ZMI-7705 laser head.

Stable dual-frequency 20MHz laser output,matched with ZMI measurement electronics.

Orthogonal linear polarized beam,suitable for multi-axis interferometer measurement.

Higher optical power to support longer optical path layout.

Built-in 30dB optical isolator,resist back-reflection interference.

Discontinued obsolete optical module,supply only for old precision equipment spare replacement.

Vibration resistant mechanical structure,suitable for precision metrology cabinet.

Diagnostic

LED alarm on:laser tube aging,power supply abnormality;

No laser output:check power wiring and laser tube health;

Low optical power warning:laser tube attenuation,optical window contamination;

Measurement reading jitter:insufficient warm-up,poor vibration isolation or optical path reflection interference.

Product Brief

ZYGO 8070-0902-03X is heterodyne He-Ne laser head (Model ZMI-7705) for ZMI laser interferometer system.

It provides stable dual-frequency laser source for ultra-precision displacement measurement,widely used as spare part for semiconductor lithography platform and optical metrology equipment renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.