ZYGO PCB-I-E-144 Signal Processing Interface Board

Technical Specifications

Model:PCB-I-E-144

Brand:ZYGO

Product type:Signal Processing Interface PCB Board

Base material:FR-4 high density substrate,gold plated copper trace

Power supply:+5V DC

Signal isolation:Built-in electromagnetic shielding structure

Board form factor:VME standard card

Weight:0.38kg

Operating temperature:10℃ ~ +40℃

Storage temperature:-40℃ ~ +70℃

Relative humidity:5%~80%,non-condensing

Certification:CE

System compatibility

PCB-I-E-144 belongs to ZYGO ZMI series metrology board.

Specially matched with ZMI-2001 VME measurement board.

Work cooperatively with ZMI 7702/7705 laser heads and fiber optical pickup heads.

Designed for semiconductor lithography precision stage displacement metrology system.

Commonly used for old precision equipment maintenance and spare replacement.

Function

Signal pre-processing and interface conversion board for ZMI laser interferometer system.

Receive raw heterodyne optical signal converted electrical signal from optical pickup unit.

Filter and amplify weak interference signal before sending to ZMI-2001 main measurement board.

Realize impedance matching and signal isolation,suppress electromagnetic interference.

Transmit processed signal to VME backplane for sub-nanometer displacement calculation.

Monitor signal quality and feed back signal abnormality status.

Installation

Power off the whole metrology rack and cut off VME chassis power.

Insert PCB-I-E-144 card into vacant VME slot and fasten front panel screw.

Connect front panel signal cable between this board and optical pickup module.

Check VME backplane contact.

Power on system,run signal test and verify signal waveform quality.

Complete system calibration together with laser head and measurement board.

Interface

VME backplane connector,front panel signal input connector,status indicator LED.

Feature

ZYGO PCB-I-E-144,VME format signal processing interface circuit board.

Gold-plated traces for stable high frequency weak signal transmission.

Integrated EMC shielding to reduce noise interference in cleanroom environment.

Signal pre-amplification and filtering function to improve measurement stability.

Discontinued obsolete PCB assembly,supply only for old precision equipment spare replacement.

Standard VME card design,easy to install and replace.

Diagnostic

No input signal:check signal cable connection,connector pin damage;

Weak signal amplitude:optical power insufficient or board circuit attenuation;

Signal noise jitter:poor shielding,grounding problem or cable interference;

Board failure:LED indicator off,check +5V power supply.

Product Brief

ZYGO PCB-I-E-144 is a VME form signal processing interface PCB board for ZMI-2001 interferometer system.

It preprocesses heterodyne interference signal to guarantee stable nanometer displacement measurement,widely used as spare part for semiconductor lithography metrology rack renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.