ZYGO ZMI-2002 Laser Interferometer Displacement Measurement Board

Technical Specifications

Model:ZMI-2002

Brand:ZYGO

Product type:VMEbus Dual-Axis Heterodyne Laser Interferometer Measurement Board

Power supply:+5V ±5% @3.5A

Bus interface:Standard VMEbus,also programmable via P2 local bus

Form factor:6U single-height VME card

Weight:0.75kg

Measurement axes:2 independent measurement axes per card

Position data format:36-bit two's complement

Velocity data format:32-bit two's complement

Time resolution:25 ns

Maximum synchronous axes:Up to 16 axes with multiple boards cascaded

VME addressing:A16/A24/A32

Onboard indicator:Optical signal status LED,system running LED,fault alarm LED

Operating temperature:0℃ ~ +55℃

Storage temperature:-40℃ ~ +85℃

Relative humidity:5%~90%,non-condensing

Certification:CE

System compatibility

ZMI-2002 belongs to ZYGO ZMI2000 laser interferometry measurement series.

It matches ZYGO heterodyne laser heads and works with standard VME CPU boards,multiple cards can be cascaded.

Mainly applied in semiconductor lithography platform,precision motion stage and optical metrology systems.

Commonly used for old semiconductor equipment maintenance and spare replacement.

Function

High precision heterodyne laser interferometric displacement measurement board for VME system.

Single card supports two independent axes real-time displacement,velocity measurement.

Process optical heterodyne signal and convert to high-resolution position digital data.

Support P2 high-speed data output,provide real-time position feedback for precision motion servo control.

Detect optical power loss,PLL and DLL signal error,output fault status.

Transmit measurement data to VME host controller via VME bus.

Support hardware self-test for optical path and circuit,fault state displayed via LED indicator.

Installation

Power off VME chassis.

Insert ZMI-2002 card into empty 6U VME slot,tighten front panel fixing screw.

Connect optical fiber from ZYGO laser head to front panel optical ports.

Set base address and interrupt level via board jumpers.

Power on chassis,run optical signal calibration and hardware self-test.

Interface

VME P1/P2 backplane connector,two-channel optical signal ports,LED indicators.

Feature

6U single slot VME laser interferometer measurement board,ZYGO ZMI2000 series.

Dual-axis parallel measurement,sub-nanometer resolution for ultra-precise motion measurement.

36-bit high-bit position output,ensure long stroke high precision position readout.

Support multi-card cascading to expand total measurement axes.

Heterodyne signal processing architecture,strong anti-interference ability.

Discontinued obsolete VME module,supply only for old precision equipment spare replacement.

Vibration resistant PCB design,suitable for precision metrology cabinet.

Diagnostic

LED alarm on:optical signal insufficient,address jumper error,VME bus communication fault;

No measurement data:check optical fiber connection,laser head working status and optical path alignment;

Measurement reading jitter:check optical path shielding and environmental temperature fluctuation;

VME communication failure:check backplane contact and VME host configuration.

Product Brief

ZYGO ZMI-2002 is legacy 6U VME dual-axis heterodyne laser interferometer measurement board with sub-nanometer resolution.

It provides real-time displacement and velocity feedback,widely used as spare part for semiconductor lithography platform,precision motion stage and optical metrology equipment renovation.

Disclaimer

All parameters are for reference only and not for quotation basis. Goods are scarce and will be powered on for inspection before shipment. Overseas delivery lead time 3-7 working days. This item is only used for equipment maintenance and retrofit.