ZYGO

• ZYGO 77016191-0460 Heterodyne Laser Head

  ZYGO 77016191-0460 heterodyne laser head,matched with ZMI series VME measurement boards,used for semiconductor ultra-precision displacement metrology spare part...

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• ZYGO ZMI-2001 8020-0210-01 Laser Interfe

  ZYGO ZMI-2001 8020-0210-01 legacy 6U VME heterodyne laser interferometer board,single measurement axis,sub-nanometer resolution,36-bit position data,for semicon...

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• ZYGO ZMI-2001 Laser Interferometer Displ

  ZYGO ZMI-2001 legacy 6U VME heterodyne laser interferometer board,single measurement axis,sub-nanometer resolution,36-bit position data,for semiconductor precis...

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• ZYGO ZMI-2002 Laser Interferometer Displ

  ZYGO ZMI-2002 legacy 6U VME heterodyne laser interferometer board,2 measurement axes,sub-nanometer resolution,36-bit position data,for semiconductor precision s...

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• ZYGO ZMI-4104 Laser Interferometer Displ

  ZYGO ZMI-4104 legacy 6U VME64x laser interferometry board,4 measurement axes,0.15nm resolution,cyclic error compensation,for semiconductor precision positioning...

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