Entegris W040N-HS12-01-FW 12 Inch Wafer Shuttle Unit

Feature & Principle

This wafer shuttle adopts ultra-low particle material design, carries single 12-inch wafer for transmission between process stations. The positioning contact structure prevents wafer slipping and scratching, matches with robotic arm and FOUP system to realize automatic wafer circulation in the semiconductor process.

Specifications

Model: W040N-HS12-01-FW Brand: Entegris Wafer size: 300mm (12 inch) Environment: Cleanroom Material: High purity PEEK engineering plastic Standard: SEMI Certification: Semiconductor clean standard

Components & Diagnostics

Wafer support contact pins, positioning reference frame, sensor flag, mounting base. Common faults: contact wear, particle pollution, positioning offset, sensor detection failure.

Product Brief

W040N-HS12-01-FW wafer shuttle, Entegris semiconductor spare widely used for etching, deposition and lithography equipment wafer transmission system.