MKS 179AX13CS3BM Mass Flow Meter Inquiry Item

Product Description

179AX13CS3BM is MKS 179A series analog mass flow meter (MFM). It adopts thermal sensing principle, only measures gas mass flow without flow adjustment function. It features metal sealing structure, good corrosion resistance and stable zero point, outputs analog flow signal for upper system acquisition and monitoring. Compact standard 3-inch installation footprint, easy to replace and install. Widely used in semiconductor, vacuum coating and thin-film process gas monitoring.

Technical Specifications

Model: 179AX13CS3BM Brand: MKS Instruments Series: 179A Mass-Flo Type: Mass flow meter (MFM, no control valve) Signal: Analog 0-5V / 0-10V Seal: Metal seal Connector: DB15 Mounting: Standard 3 inch footprint Certification: CE, SEMI Protection grade: IP40

Components & Troubleshooting

It includes thermal flow sensor, laminar flow element, signal amplification circuit, metal gas channel, DB15 signal connector and stainless steel manifold. Common faults: Zero drift, unstable flow reading, sensor contamination, signal output loss, internal gas leakage.

Disclaimer

This spare part shall be installed, calibrated and maintained by qualified instrument technicians. Calibrate with standard gas before formal process use.