Brooks 5301HS1S1V4 Mass Flow Controller

Feature & Principle

It is a thermal mass flow controller based on the principle of heat transfer. The gas flows through the sensing capillary, and the temperature difference of the sensing winding is proportional to the gas mass flow. The built-in control valve adjusts the flow automatically to maintain the set flow value. It supports analog 4-20mA signal for setpoint and feedback. It has good repeatability and fast response, widely used for precise gas distribution in semiconductor, vacuum and chemical process systems.

Specifications

Model: 5301HS1S1V4 Brand: Brooks Series: 5300 Measurement type: Thermal mass flow for gas Signal: 4-20mA Wetted material: Stainless steel Mounting: Pipeline installation Protection: IP30 Application: Semiconductor manufacturing, inert gas, process gas, vacuum equipment Certification: CE

Components & Diagnostics

Sensor capillary, control solenoid valve, electronic drive board, signal terminal, flow calibration body. Common faults: flow drift, valve cannot close, no flow output, zero drift.

Product Brief

5301HS1S1V4 thermal mass flow controller, Brooks gas flow control spare widely used for semiconductor and process gas system overhaul and replacement.