Entegris 2-W300N-HS12-01-FW Wafer Shuttle Unit

Feature & Principle

This wafer shuttle is designed for automatic material handling system. It carries single 300mm wafer and transfers between process chambers. With precision positioning structure and particle control design, it avoids wafer scratch and contamination, cooperates with robot and FOUP system to realize automatic wafer flow.

Specifications

Model: 2-W300N-HS12-01-FW Brand: Entegris Wafer size: 300mm (12 inch) Application: Semiconductor wafer transfer Material: High purity engineering plastic Particle level: Semiconductor cleanroom grade Certification: SEMI standard

Components & Diagnostics

Wafer support contact points, positioning guide frame, sensor trigger flag, mounting base. Common faults: contact wear, particle generation, positioning offset, sensor detection failure.

Product Brief

2-W300N-HS12-01-FW wafer shuttle, Entegris semiconductor spare widely used for lithography, etching and deposition equipment wafer handling system.