MKS Instruments 51B11TGA2BA.75 Capacitance Manometer

Technical Specifications

Model：51B11TGA2BA.75Brand：MKS InstrumentsProduct Type: 51B series absolute Baratron capacitance manometer

Module Feature

MKS 51B11TGA2BA.75 is 51B series compact absolute capacitance manometer with full scale 0.75 Torr. It adopts corrosion-resistant metal diaphragm sensor cell, gas-independent absolute pressure measurement, high accuracy and excellent long-term stability. Compact footprint, low outgassing, suitable for high purity and mildly corrosive semiconductor process gases. Widely deployed for pressure monitoring on semiconductor etching, CVD and ALD vacuum chamber.

Working principle: Process vacuum pressure deflects metal diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Metal sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:0.75 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 51B series Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop vacuum pressure control system for semiconductor process chamber.

Function

51B11TGA2BA.75 Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure, reading unaffected by gas type. All-metal flow path reduces particle generation and outgassing. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision low-range pressure monitoring component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 51B11TGA2BA.75.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

51B11TGA2BA.75 MKS Instruments 51B series absolute Baratron capacitance manometer,0.75 Torr full scale,gas-independent pressure measurement,for semiconductor high purity vacuum chamber high precision low pressure monitoring.