MKS Instruments PR4000B Pressure Controller

Module Feature

MKS PR4000B belongs to PR4000 series digital pressure controller. It integrates capacitance pressure sensor and control valve for closed-loop pressure regulation. Fast response and outstanding repeatability, all-metal wetted construction for ultra-high purity and corrosive process gas. Widely applied for precise pressure control on etch, CVD and ALD semiconductor gas delivery systems.

Working principle: Built-in pressure sensor continuously monitors process pressure. Control circuit adjusts integrated valve to maintain pressure at target setpoint via closed-loop feedback. Onboard components: Baratron pressure sensing cell, proportional control valve, digital control PCB, all-metal manifold, metal compression fittings, multi-pin D-sub electrical connector

LED indicatorsPower, control active and fault LED indicators on controller housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, pressure regulation test, gas leak tightness test

Programming software

MKS pressure controller configuration software for pressure setpoint setup, calibration and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control interface:Digital communication + 0-10V analog I/O Wetted material:316L stainless steel Applicable gas:High purity & corrosive semiconductor process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS PR4000 series pressure controller

System compatibility

Installed inline on semiconductor gas pipeline, matched with MKS MFC and Baratron gauge for gas delivery pressure control.

Function

PR4000B digital pressure controller manufactured by MKS Instruments. It regulates gas pressure automatically with closed-loop control. All-metal flow path reduces particle generation. Sensor contamination or valve seat wear will lead to pressure drift and unstable regulation. It is high precision pressure control component for semiconductor ultra-clean gas panel.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount controller inline on gas manifold following marked flow direction. Connect 24V DC power and signal cable. Complete gas leak test, zero and span calibration before production startup.

Interface

Metal seal gas inlet and outlet compression fittings, multi-pin D-sub connector for DC power and control signal, status LED indicators on housing of PR4000B.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. Unstable pressure: Valve seat wear or inlet pressure fluctuation. No control response: Power failure or communication fault. Gas leakage: Fitting loose or manifold seal damage.

Product Brief

PR4000B MKS Instruments PR4000 series digital pressure controller,closed-loop pressure regulation,all metal wetted path,for semiconductor gas delivery panel precise gas pressure control.