MKS Instruments 625A11TDE Capacitance Manometer

Technical Specifications

Model：625A11TDE Brand：MKS Instruments Product Type: Type625A unheated absolute Baratron capacitance manometer

Module Feature

MKS 625A11TDE is Type625A ambient-temperature absolute capacitance manometer with full scale 10 Torr. It adopts all-welded Inconel diaphragm sensing cell, gas-independent absolute pressure reading. Built-in dual adjustable relay trip points for process alarm and equipment interlock. High accuracy, low hysteresis and excellent long-term stability. Unheated design for clean non-condensing process gas. Widely deployed for pressure monitoring and interlock protection on etch, CVD and ALD semiconductor vacuum chamber.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output, relay triggers when pressure exceeds configured threshold. Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, dual relay circuit, stainless steel housing, KF vacuum flange, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing, relay status LED for trip points

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, relay trip point verification, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, relay setpoint configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:10 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Relay:Two adjustable SPDT trip relays Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via KF flange Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type625A Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop vacuum pressure control system, provides pressure interlock signal for semiconductor process chamber.

Function

625A11TDE Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure, reading unaffected by gas type. Integrated relay output enables hardware interlock and alarm protection. Diaphragm contamination or overpressure will lead to reading drift and relay malfunction. It is high precision pressure monitoring & interlock component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque KF flange clamp. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration and relay trip test before production startup.

Interface

KF vacuum process flange,15 pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 625A11TDE.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Relay fail to trigger: Improper trip point setting or circuit defect. Vacuum leakage: Flange clamp insufficient torque or gasket damage.

Product Brief

625A11TDE MKS Instruments Type625A unheated absolute Baratron capacitance manometer,10 Torr full scale,gas-independent measurement,built-in dual relay trip points,for semiconductor vacuum chamber pressure monitoring and safety interlock.