MKS Instruments DLTNA3-32099 Mass Flow Controller

Technical Specifications

Model：DLTNA3-32099Brand：MKS InstrumentsProduct Type: DLT series digital thermal mass flow controller

Module Feature

MKS DLTNA3-32099 is high-end digital all-metal thermal mass flow controller. Full welded metal flow path without elastomer seals, suitable for aggressive, high purity semiconductor specialty gases. Digital control architecture provides fast response, outstanding repeatability and low zero drift. Built-in comprehensive self-diagnosis function. Widely deployed on semiconductor etching, ALD and dielectric deposition gas panels.

Working principle: Thermal mass flow sensor measures gas mass flow rate, digital proportional valve adjusts opening to maintain flow at target setpoint Onboard components: Thermal sensing element, metal proportional control valve, digital control PCB, all-metal manifold body, metal compression fittings, multi-pin electrical connector

LED indicatorsPower, flow active and fault LED indicators on MFC housing

Hardware self-diagnosis

Visual inspection, gas leak test, zero and span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MFC configuration software for gas recipe setup, flow parameter tuning and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control interface:Digital communication + 0-10V analog I/O Wetted material:316L stainless steel all-metal seal Applicable gas:High purity corrosive and non-corrosive semiconductor process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DLT series mass flow controller

System compatibility

Installed on semiconductor gas manifold, works with MKS Baratron pressure transducers and pressure control assemblies for vacuum gas delivery system.

Function

DLTNA3-32099 is digital thermal mass flow controller manufactured by MKS Instruments. It continuously detects gas mass flow and dynamically adjusts valve opening to stabilize flow. All-metal construction minimizes particle generation and outgassing. Sensor contamination or valve seat wear will cause flow deviation and gas leakage. It is high precision gas flow regulation component for advanced semiconductor process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount DLTNA3-32099 on gas manifold following marked flow direction. Connect gas metal fittings and 24V DC power & signal cable. Complete leak test, zero calibration and closed-loop flow verification before operation.

Interface

Gas inlet and outlet metal compression fittings, multi-pin electrical connector for power, digital communication and analog signal, status LED indicators on housing of DLTNA3-32099.

Diagnostic

Flow reading drift: Sensor contamination or valve sticking. Cannot reach target flow: Supply gas pressure fluctuation or valve aging. Gas leakage: Fitting loose or metal seal damage. Communication failure: Wiring fault or control board abnormality.

Product Brief

DLTNA3-32099 MKS Instruments DLT series digital all-metal thermal mass flow controller,for advanced semiconductor high purity corrosive gas precise mass flow regulation,gas panel mount digital MFC.