MKS Instruments DMA-28769 Mass Flow Controller

Technical Specifications

Model：DMA-28769Brand：MKS InstrumentsProduct Type: DMA series all-metal sealed thermal mass flow controller

Module Feature

MKS DMA-28769 is high performance all-metal thermal mass flow controller. It adopts thermal mass sensing principle with fully welded metal manifold without elastomer seals, suitable for aggressive and high purity specialty semiconductor process gas. Digital control circuit delivers fast response, excellent repeatability and low zero drift. Built-in self-diagnosis function. Widely used for gas delivery panels of semiconductor etching, ALD and PECVD process.

Working principle: Thermal flow element detects gas mass flow rate, proportional valve continuously adjusts opening to match target flow setpoint Onboard components: Thermal sensing element, metal proportional control valve, digital control PCB, all-metal manifold body, metal compression fittings, multi-pin electrical connector

LED indicatorsPower, flow status and fault LED indicators on device housing

Hardware self-diagnosis

Visual inspection, gas leak tightness test, zero & span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MFC configuration software for gas recipe parameter setup, flow setpoint configuration and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control interface:0-10V analog I/O + digital communication Wetted material:316L stainless steel all-metal seal Applicable gas:High purity corrosive & non-corrosive semiconductor process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DMA series mass flow controller

System compatibility

Installed on semiconductor high purity gas manifold, compatible with MKS Baratron pressure gauges and pressure control assemblies for vacuum gas delivery system.

Function

DMA-28769 is thermal mass flow controller manufactured by MKS Instruments. It continuously measures gas mass flow and dynamically modulates valve aperture to maintain stable gas flow. All-metal flow path reduces particle generation and outgassing. Sensor contamination or valve seat aging will cause flow instability and gas leakage. It is core flow regulating component for semiconductor gas panel.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount DMA-28769 on gas manifold following marked gas flow direction. Connect metal gas fittings and 24V DC power & signal cable. Complete gas leak test, zero calibration and closed-loop flow verification before operation.

Interface

Gas inlet and outlet metal compression fittings, multi-pin electrical connector for power, analog signal and digital communication, status LED indicators on housing of DMA-28769.

Diagnostic

Flow reading abnormal: Sensor contamination or valve sticking. Cannot reach target flow: Gas supply pressure fluctuation or valve aging. Gas leakage: Fitting loose or metal seal damage. Communication failure: Wiring fault or control board defect.

Product Brief

DMA-28769 MKS Instruments DMA series all-metal thermal mass flow controller,digital control design,for semiconductor high purity corrosive gas precise mass flow regulation,gas panel mount MFC.