MKS Instruments 122BA-01000EB-S Capacitance Manometer

Technical Specifications

Model：122BA-01000EB-S Brand：MKS Instruments Product Type: Type 122B compact absolute Baratron capacitance manometer

Module Feature

MKS 122BA-01000EB-S is Type 122B compact Baratron capacitance manometer with full scale 1000 Torr. It uses Inconel tensioned diaphragm capacitance sensing principle, pressure reading independent of gas composition. Integrated electronic circuit inside cylindrical stainless steel housing. Metal seal vacuum fitting, low temperature drift and high measurement accuracy. Widely used for vacuum pressure monitoring on semiconductor etch, CVD and PVD thin-film process chamber.

Working principle: Diaphragm deflection changes capacitance value, converts vacuum pressure variation into linear 0-10V analog output signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, cylindrical metal housing, vacuum metal fitting, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm contamination check, zero calibration test, analog output linearity test, vacuum leak tightness test

Programming software

MKS gauge diagnostic software for zero adjustment, signal verification and fault log reading

Electrical & Process Parameters

Full scale pressure:1000 Torr Power supply:±15V DC Analog output:0-10V DC Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mounting on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 122B series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valves, integrated into semiconductor vacuum closed-loop pressure control system.

Function

122BA-01000EB-S is Baratron capacitance manometer manufactured by MKS Instruments. It detects absolute vacuum pressure and transmits analog feedback signal to pressure controller. Gas-independent measurement supports multiple semiconductor process gases. Diaphragm contamination, overpressure impact will cause zero drift and abnormal pressure reading. It is classic compact high precision pressure sensor for vacuum chamber monitoring.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and tighten fitting evenly. Connect ±15V DC power and signal cable. Perform zero calibration and signal output verification before production startup.

Interface

Vacuum metal sealing process port,15 pin D-sub connector for power and analog signal, status LED indicators on housing of 122BA-01000EB-S.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Vacuum fitting loose or metal gasket damage.

Product Brief

122BA-01000EB-S MKS Instruments Type122B Baratron capacitance manometer,1000 Torr full scale,gas-independent absolute vacuum pressure measurement,for semiconductor vacuum chamber high precision pressure monitoring,cylindrical compact Baratron gauge.