MKS Instruments 622B11TBE Capacitance Manometer

Technical Specifications

Model：622B11TBE Brand：MKS Instruments Product Type: Type622B unheated absolute Baratron capacitance manometer

Module Feature

MKS 622B11TBE is Type622B ambient-temperature absolute capacitance manometer with 10 Torr full scale. It adopts all-welded Inconel diaphragm sensing cell, gas-independent absolute pressure measurement. Fast response, low hysteresis and excellent long-term stability. Unheated design suitable for clean, non-condensing process gas. Compact structure, low outgassing, widely used for semiconductor etching, CVD and ALD vacuum chamber pressure monitoring.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:10 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type622B Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to construct closed-loop vacuum pressure control system for semiconductor process chamber.

Function

622B11TBE Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure, reading unaffected by gas type. All-welded Inconel sensor provides reliable corrosion resistance. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision vacuum pressure sensor for clean semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 622B11TBE.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

622B11TBE MKS Instruments Type622B unheated absolute Baratron capacitance manometer,10 Torr full scale,gas-independent pressure measurement,all-welded Inconel wetted parts,for semiconductor clean vacuum chamber high precision pressure monitoring.