MKS Instruments CT27A11TDC910 Capacitance Manometer

Module Feature

MKS CT27A11TDC910 belongs to CT27 CommunicaTorr series digital Baratron capacitance manometer with full scale 10 Torr. It adopts all-welded Inconel diaphragm sensing cell, gas-independent absolute pressure measurement. Integrates DeviceNet digital communication interface for industrial bus connection, plus analog output signal. NW16 ISO-KF vacuum flange, excellent long-term stability, suitable for semiconductor etch, CVD and ALD vacuum chamber pressure measurement.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into pressure reading, transmits data via DeviceNet and analog channel. Onboard components: Inconel sensing diaphragm, capacitance sensor cell, digital signal processing PCB, stainless steel housing, NW16 vacuum flange, DeviceNet multi-pin electrical connector

LED indicatorsPower, network status and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, DeviceNet communication test, vacuum leak tightness test

Programming software

MKS Baratron diagnostic software for zero adjustment, network address configuration and fault log reading

Electrical & Process Parameters

Power supply:24V DC Output:DeviceNet digital communication + 0-10V DC analog signal Full scale pressure:10 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel Flange:NW16 ISO-KF

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via NW16 flange Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS CT27 CommunicaTorr series Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve, transmits pressure data over DeviceNet bus for semiconductor vacuum closed-loop control system.

Function

CT27A11TDC910 digital CommunicaTorr Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure, reading independent of gas type. Dual output of digital bus and analog signal brings flexible integration. Diaphragm contamination or overpressure will trigger pressure reading drift and communication failure. It is high precision digital vacuum pressure sensor for semiconductor process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque NW16 flange clamp. Connect 24V DC power and DeviceNet signal cable. Complete vacuum leak test, zero and span calibration before production startup.

Interface

NW16 ISO-KF vacuum process flange, multi-pin connector for 24V power, DeviceNet communication and analog signal, status LED indicators on housing of CT27A11TDC910.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No communication: Wrong node address or wiring fault. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Flange clamp insufficient torque or metal gasket damage.

Product Brief

CT27A11TDC910 MKS Instruments CT27 CommunicaTorr series digital Baratron capacitance manometer,10 Torr full scale,NW16 flange,DeviceNet digital interface,gas-independent measurement,for semiconductor vacuum chamber high precision pressure monitoring.