MKS Instruments 621C01TNFMD Capacitance Manometer

Technical Specifications

Model：621C01TNFMD Brand：MKS Instruments Product Type: Type 621C absolute Baratron capacitance manometer

Module Feature

MKS 621C01TNFMD is high precision Baratron capacitance manometer, marked UNMP (Unused New Material Part). It adopts Inconel diaphragm capacitance sensing principle, pressure reading is independent of gas species. Compact integrated sensor and electronic design, low temperature drift and excellent long-term stability. 15V DC power input, 0-10V analog output. Widely used for vacuum pressure monitoring in semiconductor etching, CVD and PVD thin-film process.

Working principle: Diaphragm deformation changes capacitance value, converts vacuum pressure variation into linear analog electrical signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, vacuum port, multi-pin D-sub electrical connector

LED indicatorsPower and fault status LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero point adjustment, signal verification and fault log reading

Electrical & Pressure Parameters

Power supply:15V DC Analog output:0-10V DC Measurement type:Absolute pressure Status:UNMP unused new spare part

Mechanical & Structure

Mounting:Direct installation on vacuum chamber via vacuum fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 621C series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valve, integrated into semiconductor vacuum closed-loop pressure control system.

Function

621C01TNFMD is Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure and transmits analog feedback signal to pressure controller. Gas-independent measurement guarantees consistent reading for various process gases. Diaphragm contamination, overpressure impact will lead to zero drift and measurement deviation. It serves as high precision pressure feedback sensor for vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and fasten flange bolts evenly. Connect 15V DC power and signal cable. Perform zero calibration and signal output verification before production operation.

Interface

Vacuum process fitting,15 pin D-sub connector for 15V DC power and analog signal, status LED on housing of 621C01TNFMD.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Unstable reading: Vacuum fitting leakage.

Product Brief

621C01TNFMD MKS Instruments Baratron capacitance manometer,15VDC power supply,gas-independent vacuum pressure sensor,UNMP unused spare part for semiconductor vacuum chamber high precision pressure monitoring.