MKS Instruments 627B11TDC2P Capacitance Manometer

Technical Specifications

Model：627B11TDC2P Brand：MKS Instruments Product Type: Type627B unheated absolute Baratron capacitance manometer

Module Feature

MKS 627B11TDC2P belongs to Type627B series ultra-high precision absolute capacitance manometer with full scale 1 Torr. It adopts all-welded Inconel diaphragm sensing cell, gas-independent absolute pressure measurement. Excellent stability and fast response for low vacuum measurement. NW16 ISO-KF flange, ultra-clean wetted surface and low outgassing, widely deployed for pressure monitoring on semiconductor etch, CVD and ALD vacuum chamber.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, NW16 vacuum flange, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:1 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel Flange:NW16 ISO-KF

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via NW16 flange Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type627B Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop ultra-high vacuum pressure control system for semiconductor process chamber.

Function

627B11TDC2P Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures low absolute vacuum pressure, reading unaffected by gas composition. All-welded Inconel sensor delivers reliable corrosion resistance. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision low-range vacuum pressure sensor for semiconductor ultra-clean vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque NW16 flange clamp. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

NW16 ISO-KF vacuum process flange,15 pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 627B11TDC2P.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Flange clamp insufficient torque or metal gasket damage.

Product Brief

627B11TDC2P MKS Instruments Type627B unheated absolute Baratron capacitance manometer,1 Torr full scale,NW16 flange,gas-independent measurement,all-welded Inconel wetted parts,for semiconductor ultra-high vacuum chamber high precision pressure monitoring.