MKS Instruments 631C01MNFH Capacitance Manometer

Technical Specifications

Model：631C01MNFH Brand：MKS Instruments Product Type: Type 631C heated absolute Baratron capacitance manometer

Module Feature

MKS 631C01MNFH is 631C series heated absolute Baratron capacitance manometer, full scale 1 Torr, 150°C temperature controlled sensor. The heated design prevents process gas condensation and deposition on diaphragm, ideal for corrosive semiconductor process gas. Inconel diaphragm delivers gas-independent absolute pressure measurement, high accuracy and outstanding long-term stability. Widely used for CVD, etch and ALD vacuum chamber pressure monitoring.

Working principle: The Inconel diaphragm forms variable capacitance with fixed electrode, capacitance value changes with absolute vacuum pressure, signal circuit converts capacitance change into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, temperature control circuit, signal conditioning PCB, stainless steel housing, metal vacuum fitting, 15-pin D-sub electrical connector

LED indicatorsPower, heater status and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, heater temperature test, zero calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS gauge diagnostic software for zero adjustment, span calibration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC proportional to pressure Full scale range:1 Torr Heated temperature:150°C Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 631C series heated Baratron manometer

System compatibility

Works with MKS 651C pressure controller and 253 series throttle valve, forming closed-loop vacuum pressure control system for semiconductor process chamber.

Function

631C01MNFH is heated Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure independent of gas type. 150°C heating avoids condensation and particle contamination on sensor diaphragm. Diaphragm damage or heater failure will cause pressure reading drift and measurement error. It is high precision pressure measuring component for corrosive semiconductor vacuum processes.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero & span calibration before production startup.

Interface

Metal seal vacuum process port,15 pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 631C01MNFH.

Diagnostic

Pressure reading drift: Diaphragm contamination or heater temperature abnormality. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Metal fitting improper torque or gasket damage.

Product Brief

631C01MNFH MKS Instruments Type631C heated absolute Baratron capacitance manometer,1 Torr full scale,150°C heated design,gas-independent vacuum pressure sensor,for semiconductor corrosive process chamber pressure monitoring.