MKS Instruments 872B12PME2GC1 Pressure Transducer

Technical Specifications

Model：872B12PME2GC1 Brand：MKS Instruments Product Type: 872B series flow-through Micro-Baratron absolute pressure transducer

Module Feature

MKS 872B12PME2GC1 belongs to 872B Micro-Baratron flow-through absolute pressure transducer, full scale 100 PSIA. It adopts all-welded Inconel sensing cell, gas-independent pressure reading, high accuracy and excellent long-term stability. Flow-through inline design, ultra-clean wetted surface, low outgassing, suitable for high purity and corrosive semiconductor process gas delivery lines. Widely used for gas panel pressure monitoring on etch, CVD and ALD equipment.

Working principle: Process gas pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel flow-through manifold, metal compression fittings, 9-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on transducer housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, gas leak tightness test

Programming software

MKS Baratron diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:+13 ~ +32V DC Analog output:0-10V DC Full scale pressure:100 PSIA Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Inline gas manifold mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 872B series Micro-Baratron transducer

System compatibility

Installed inline on semiconductor gas pipeline, matched with MKS MFC and Baratron gauge for gas delivery pressure monitoring.

Function

872B12PME2GC1 flow-through Micro-Baratron pressure transducer manufactured by MKS Instruments. It measures absolute gas pressure, reading independent of gas type. Inline flow-through structure reduces dead volume. Diaphragm contamination or overpressure will lead to pressure reading drift and measurement error. It is ultra-clean inline pressure sensor for semiconductor gas delivery system.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount transducer inline on gas manifold following marked flow direction. Connect DC power and analog signal cable. Complete gas leak test, zero and span calibration before production startup.

Interface

Metal seal gas inlet and outlet compression fittings,9 pin D-sub connector for DC power and 0-10V analog signal, status LED indicators on housing of 872B12PME2GC1.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Gas leakage: Fitting loose or manifold weld defect.

Product Brief

872B12PME2GC1 MKS Instruments 872B series Micro-Baratron flow-through absolute pressure transducer,100 PSIA full scale,gas-independent measurement,ultra-clean low dead volume design,for semiconductor gas delivery panel inline pressure monitoring.