MKS Instruments DMA-27869 Capacitance Manometer

Technical Specifications

Model：DMA-27869 Brand：MKS Instruments Product Type: DMA series digital heated absolute Baratron capacitance manometer

Module Feature

MKS DMA-27869 belongs to DMA series digital Baratron capacitance manometer. It adopts temperature-controlled Inconel diaphragm sensing cell, gas-independent absolute pressure measurement. Supports DeviceNet digital communication together with analog 0-10V dual output. Heated sensor design prevents process gas condensation and deposition, reduces contamination risk. Excellent overpressure resistance, high accuracy and outstanding long-term stability. Widely used for semiconductor etch, CVD and ALD vacuum chamber pressure monitoring.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, internal circuit converts capacitance signal into digital DeviceNet signal and analog 0-10V output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, temperature control circuit, digital communication PCB, stainless steel housing, metal vacuum fitting, multi-pin electrical connector

LED indicatorsPower, heater status, communication and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, heater temperature test, zero & span calibration, analog and digital output verification, vacuum leak tightness test

Programming software

MKS Baratron diagnostic software for zero adjustment, DeviceNet address configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Output:0-10V analog + DeviceNet digital communication Measurement type:Absolute pressure Wetted material:Inconel / 316L stainless steel Measurement feature:Gas composition independent

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DMA series Baratron manometer

System compatibility

Compatible with MKS pressure controller and throttle valve, integrated into semiconductor vacuum closed-loop pressure control system.

Function

DMA-27869 digital heated Baratron capacitance manometer manufactured by MKS Instruments. It delivers both digital and analog pressure signal, reading not affected by gas type. Heated sensor minimizes condensate accumulation. Diaphragm contamination, overpressure or heater failure will trigger pressure reading drift and communication abnormality. It is high precision digital pressure sensor for demanding semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and communication cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for ±15V power, analog signal and DeviceNet communication, status LED indicators on housing of DMA-27869.

Diagnostic

Pressure reading drift: Diaphragm contamination or heater temperature abnormality. No communication output: Power fault or DeviceNet wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

DMA-27869 MKS Instruments DMA series digital heated Baratron capacitance manometer,support DeviceNet digital and analog dual output,gas-independent pressure measurement,for semiconductor corrosive vacuum chamber high precision pressure monitoring.