MKS Instruments DMA12TCEEANN63 3 Mass Flow Controller

Technical Specifications

Model：DMA12TCEEANN63 3 Brand：MKS Instruments Product Type: DMA series all-metal sealed digital mass flow controller

Module Feature

MKS DMA12TCEEANN63 3 is high-performance all-metal seal thermal mass flow controller for semiconductor high-purity gas delivery system. It adopts thermal sensing principle, full metal welded flow path without elastomer contamination. Digital electronic design provides fast response, high repeatability and multi-gas configuration. Built-in self-diagnosis function. Widely used in semiconductor etching, CVD, ALD gas supply panel.

Working principle: Thermal sensor detects gas mass flow, control valve adjusts opening to maintain flow rate matching setpoint Onboard components: Thermal flow sensor, proportional control valve, digital control PCB, all-metal flow body, multi-pin electrical connector, gas inlet/outlet fittings

LED indicatorsPower, flow status and fault LED indicators on device housing

Hardware self-diagnosis

Visual inspection, gas leak test, zero and span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MFC configuration software for gas selection, parameter setup, flow monitoring and fault diagnosis

Electrical & Process Parameters

Power supply:24V DC Signal interface:Digital communication + analog 0-10V I/O Wetted material:316L stainless steel, all metal seal Gas type:Corrosive and non-corrosive high purity process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DMA series digital mass flow controller

System compatibility

Installed on semiconductor high purity gas manifold, compatible with MKS pressure gauges, pressure control assemblies and semiconductor process chamber control system.

Function

DMA12TCEEANN63 3 is mass flow controller manufactured by MKS Instruments. It measures gas mass flow in real time and automatically modulates control valve aperture to keep flow stable. All-metal sealing design minimizes particle generation and outgassing, suitable for corrosive specialty gas. Sensor contamination or valve seat wear will cause flow drift and gas leakage. It is core component to precisely control process gas mass flow.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount DMA12TCEEANN63 3 on gas panel manifold, follow marked gas flow direction. Connect gas fittings and 24V DC power & signal cable. Perform leak test, zero calibration and flow closed-loop verification.

Interface

Gas inlet and outlet metal fittings, multi-pin electrical connector for power and signal, status LED on housing of DMA12TCEEANN63 3.

Diagnostic

Flow unstable: Sensor contamination or valve sticking. Cannot reach target flow: Valve seat wear or gas supply pressure fluctuation. Gas external leakage: Fitting loose or metal seal damage. Communication failure: Wiring fault or electronic board defect.

Product Brief

DMA12TCEEANN63 3 MKS Instruments DMA series all-metal digital mass flow controller,for semiconductor high purity corrosive gas precise mass flow regulation,gas panel mount thermal MFC.