MKS Instruments GPCMA13T07304C 84T110 Capacitance Manometer

Technical Specifications

Model：GPCMA13T07304C 84T110 Brand：MKS Instruments Product Type: Baratron absolute capacitance manometer

Module Feature

MKS GPCMA13T07304C 84T110 is high precision Baratron capacitance manometer. It uses a thin metal diaphragm capacitance sensing principle to measure absolute vacuum pressure, independent of gas type. Hermetically sealed sensor cell, excellent long-term stability and low temperature drift. Integrated temperature compensation design. Widely used for pressure monitoring in semiconductor etching, PVD, CVD and other thin film vacuum processes.

Working principle: Detect diaphragm deflection by capacitance change, convert physical pressure into analog electrical output signal Onboard components: Metal sensing diaphragm, capacitance sensor cell, signal conditioning PCB, metal housing, vacuum flange connector, signal cable port

LED indicatorsPower and fault status LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, sensor diaphragm damage check, zero point calibration test, output signal linearity test, leak tightness inspection

Programming software

MKS gauge configuration software for zero adjustment, signal verification and diagnostic data reading

Electrical & Signal Parameters

Power supply: +15V DC Analog output: 0-10V DC Pressure range: 10 Torr

Mechanical & Structure

Mounting: Vacuum flange installation on process chamber Protection class:IP40

Environmental

Operating temperature:20℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI S2 compliant Status:MKS 84T series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C pressure controller and other MKS vacuum control units, applied in semiconductor vacuum process chamber pressure monitoring system.

Function

GPCMA13T07304C 84T110 is Baratron capacitance manometer manufactured by MKS Instruments. The sensor measures absolute vacuum pressure and transmits analog signal to pressure controller. The capacitance measurement principle delivers gas-independent pressure reading. Diaphragm contamination, overpressure impact will cause zero drift, reading deviation and sensor failure. It serves as high-precision pressure feedback component for vacuum closed-loop control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge via vacuum flange to chamber port, tighten flange bolts evenly. Connect +15V DC power and signal cable. Perform zero calibration and signal output verification before process startup.

Interface

Vacuum flange process connection, multi-pin electrical connector for power and analog signal, status LED on gauge housing of GPCMA13T07304C 84T110.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Pressure reading unstable: Vacuum flange leakage.

Product Brief

GPCMA13T07304C 84T110 MKS Instruments Baratron absolute capacitance manometer,gas-independent vacuum pressure measurement,for semiconductor thin-film vacuum chamber high precision pressure monitoring,flange mounted vacuum gauge.