MKS Instruments TYPE 631 631C13T8FH Capacitance Manometer

Technical Specifications

Model：TYPE 631 631C13T8FH Brand：MKS Instruments Product Type: Type 631 Baratron absolute capacitance manometer

Module Feature

MKS TYPE 631 631C13T8FH is high precision Baratron capacitance manometer with full scale 133.32kPa. It adopts capacitance diaphragm sensing principle, pressure reading is not affected by gas type. Inconel sensing diaphragm delivers outstanding corrosion resistance and long-term stability. This model uses 8VCR vacuum fitting, widely used for semiconductor etching, CVD and PVD vacuum chamber pressure measurement.

Working principle: Diaphragm deformation changes capacitance value, converts pressure variation into linear analog electrical output signal Onboard components: Inconel diaphragm sensor, signal conditioning PCB, stainless steel housing, 8VCR vacuum port, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero point adjustment, signal verification and fault log reading

Electrical & Pressure Parameters

Full scale range:133.32kPa Power supply: ±15V DC Analog output:0-10V DC Connection:8VCR female vacuum fitting

Mechanical & Structure

Mounting: Direct installation on vacuum chamber via VCR fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type 631 series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C pressure controller and MKS vacuum throttle valves, integrated into semiconductor vacuum closed-loop pressure control system.

Function

TYPE 631 631C13T8FH is Baratron capacitance manometer manufactured by MKS Instruments. It accurately detects absolute vacuum pressure and sends 0-10V analog feedback signal to pressure controller. Gas-independent measurement ensures consistent readings for various process gases. Diaphragm contamination, overpressure impact will cause zero drift and pressure reading deviation. It acts as high-precision pressure feedback sensor for vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Install gauge through 8VCR metal seal fitting, evenly torque VCR nut. Connect ±15V DC power and signal cable. Perform zero calibration and output signal verification before production.

Interface

8VCR vacuum metal sealing port,15 pin D-sub connector for power and analog signal, status LED on housing of TYPE 631 631C13T8FH.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No output signal: Power supply failure or wiring disconnection. Measurement inaccurate: Diaphragm deformation from overpressure. Gas leakage: VCR fitting loose or metal gasket damage.

Product Brief

TYPE 631 631C13T8FH MKS Instruments Baratron capacitance manometer,133.32kPa full scale,8VCR connection,gas-independent vacuum pressure sensor for semiconductor vacuum chamber pressure monitoring.