Feature & PrinciplePneumatic bellows-sealed high vacuum angle valve. Air drive opens/closes the valve spool, built-in M9BA magnetic auto switch feeds back open/close status to PLC. Metal bellows structure minimizes outgassing, avoids medium contamination, suitable for high-purity gas and vacuum process.

SpecificationsModel: XLFR-100D-M9BA-3LBrand: SMCSeries: XLFRSize: 1 inchSeal: Metal bellowsControl: Pneumatic actuatorAuto switch: D-M9BA solid state 2-wireVacuum range: 1×10⁻⁷ PaMounting: Flange installationCertification: CE

Components & DiagnosticsBellows assembly, pneumatic piston, valve seat, spring group, M9BA magnetic sensor, plastic terminal housing. Common faults: bellows rupture, vacuum leakage, switch signal missing, valve stuck.

Product BriefXLFR-100D-M9BA-3L valve, SMC XLFR high vacuum spare widely used for semiconductor, coating and laboratory gas distribution vacuum pipeline.