SMC XLFR-100D-M9BA-3L Pneumatic Vacuum Angle Valve Unit

Feature & Principle

Pneumatic high vacuum angle valve, driven by compressed air to open and close the vacuum passage, built-in M9BA solid state auto switch for valve position feedback.

Specifications

Model: XLFR-100D-M9BA-3L Brand: SMC Size: DN100 Actuation: Air operated Auto switch: D-M9BA Seal: O-ring Operating pressure: High vacuum Certification: CE

Components & Diagnostics

Valve body, pneumatic actuator, magnetic auto switch, sealing ring and air port. Common faults: seal leakage, switch signal loss, actuator stuck.

Product Brief

XLFR-100D-M9BA-3L angle valve, SMC vacuum pipeline control spare for semiconductor and vacuum industry.