AMAT 0100‑76258 Gas Panel Interface PCB Assembly

Technical Specifications

Model：0100‑76258

Brand：AMAT Applied Materials

Product Type：Gas Panel Interface PCB assembly

Applicable System：AMAT Centura 200mm semiconductor process equipment

Supply Voltage：5V,24VDC auxiliary DC power input

Interface：Multi‑pin signal connectors for gas panel sensors and valve control interconnection

Common Revision：Multiple hardware revisions available

Status Indicator：On‑board LED for channel working status and fault alarm

Built‑in Function：Gas panel digital signal acquisition,valve drive signal output,gas path status monitoring,gas system interlock logic processing,fault signal feedback to main control unit

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：Chassis internal fixed installation

Weight：0.55kg

Product Brief:

0100‑76258 is legacy gas panel interface PCB assembly manufactured by AMAT Applied Materials. It serves as signal control board for Centura equipment gas panel management subsystem. It collects status signals from gas‑path sensors and outputs drive signals for gas valves, executes gas‑system interlock logic and feeds back abnormal alarm information to main control system. On‑board LED provides visual indication for channel working and fault state. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy 200mm wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation.