AMAT 0100‑20003 Digital I/O PCB Assembly

Technical Specifications

Model：0100‑20003

Brand：AMAT Applied Materials

Product Type：Digital I/O PCB assembly

Applicable System：AMAT P5000 etch and CVD semiconductor process mainframe equipment

Supply Voltage：5V,24VDC auxiliary DC power input

Interface：VME bus edge connector,multi‑pin terminal block for valve,sensor and interlock signal interconnection

Common Revision：REV‑G,multiple hardware revisions available

Status Indicator：On‑board LED for channel status and fault alarm status

Built‑in Function：Multi‑channel digital signal acquisition,digital output drive for pneumatic valves and relays,process interlock signal processing,opto‑coupler isolation protection,fault status feedback to VME main control unit

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：VME card cage plug‑in installation

Weight：0.45kg

Product Brief:

0100‑20003 is legacy digital I/O PCB assembly manufactured by AMAT Applied Materials. It is VME‑bus digital input‑output control board dedicated for P5000 etch and CVD mainframe system. It collects digital sensor signals and outputs drive signals for pneumatic valves and relays, handles chamber interlock logic with opto‑coupler isolation protection. On‑board LED provides visual diagnosis for channel working and fault state. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation.