MKS Instruments 122A-12716 Capacitance Manometer

Technical Specifications

Model：122A-12716 Brand：MKS Instruments Product Type: Type 122A compact Baratron absolute capacitance manometer

Module Feature

MKS 122A-12716 is classic compact Baratron capacitance manometer. It adopts Inconel tension diaphragm capacitance sensing principle, pressure reading is independent of gas type. Integrated electronic circuit inside cylindrical housing, simple installation and stable performance. Widely applied for vacuum pressure monitoring on semiconductor etching, CVD and PVD thin-film vacuum chamber.

Working principle: Diaphragm deformation changes capacitance value, converts vacuum pressure into linear 0-10V analog output signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, cylindrical metal housing, vacuum port, multi-pin electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero point adjustment, signal verification and fault log reading

Electrical & Pressure Parameters

Power supply: ±15V DC Analog output:0-10V DC Measurement type:Absolute pressure

Mechanical & Structure

Mounting:Direct mounting on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 122A series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valves, used in semiconductor vacuum closed-loop pressure control system.

Function

122A-12716 is Baratron capacitance manometer manufactured by MKS Instruments. It detects absolute vacuum pressure and transmits analog feedback signal to pressure controller. Gas-independent measurement supports multiple process gas environments. Diaphragm contamination, overpressure impact will cause zero drift and inaccurate measurement. It acts as cost-effective high precision pressure feedback sensor for vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port, tighten fitting evenly. Connect ±15V DC power and signal cable. Perform zero calibration and signal output verification before production startup.

Interface

Vacuum metal sealing port, multi-pin electrical connector for power and analog signal, status LED on housing of 122A-12716.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Vacuum fitting loose or seal damage.

Product Brief

122A-12716 MKS Instruments Type122A Baratron capacitance manometer,gas-independent absolute vacuum pressure measurement,for semiconductor vacuum chamber pressure monitoring,cylindrical compact vacuum pressure gauge.