MKS Instruments 901P-12030 Vacuum Transducer

Technical Specifications

Model：901P-12030 Brand：MKS Instruments Product Type: 901P series loadlock vacuum pressure transducer

Module Feature

MKS 901P-12030 is loadlock dedicated vacuum pressure transducer integrating MicroPirani thermal sensor and piezo absolute pressure sensor. Hybrid dual-sensor design achieves wide pressure range measurement, gas-independent piezo pressure reading at high pressure segment. Compact cylindrical stainless steel body, KF vacuum flange connection, built-in setpoint relay switches. Widely used for semiconductor load lock chamber pressure monitoring during wafer transfer.

Working principle: Combine MicroPirani for low vacuum and piezo sensor for high absolute pressure, output analog signal proportional to measured chamber pressure Onboard components: MicroPirani sensing element, piezo pressure sensor, signal conditioning PCB, stainless steel housing, KF vacuum port, 15-pin HD D-sub electrical connector

LED indicatorsPower and status LED indicators on transducer housing

Hardware self-diagnosis

Visual inspection, sensor function test, pressure output linearity test, relay setpoint verification, vacuum leak tightness inspection

Programming software

MKS transducer configuration software for parameter setup, pressure unit selection and diagnostic log reading

Electrical & Pressure Parameters

Power supply: 9-30V DC Pressure measurement range: 0.001 ~ 1000 Torr Analog output: 1V/decade Relay: Built-in pressure threshold relay contacts

Mechanical & Structure

Mounting: KF flange direct mounting on loadlock chamber Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 901P series loadlock vacuum transducer

System compatibility

Used on semiconductor wafer transfer loadlock chamber, compatible with MKS pressure controller and semiconductor chamber control system.

Function

901P-12030 is loadlock vacuum pressure transducer manufactured by MKS Instruments. Dual-sensor design covers full pressure range from rough vacuum to atmospheric pressure for wafer transfer chamber. Piezo sensor provides gas-independent absolute pressure reading, MicroPirani extends low vacuum measurement range. Sensor contamination or flange leakage will cause pressure reading deviation. It is dedicated pressure monitoring component for semiconductor load lock process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount transducer via KF flange and tighten clamp evenly. Connect 9~30V DC power and signal cable. Verify pressure reading and relay threshold function before operation.

InterfaceKF vacuum flange process port,15 pin HD D-sub connector for power, analog signal and relay output, status LED on housing of 901P-12030.

Diagnostic

Pressure reading abnormal: Sensor contamination or KF flange leakage. No signal output: Power supply failure or wiring disconnection. Relay not triggering: Incorrect pressure setpoint. Unstable reading: Internal sensor aging.

Product Brief

901P-12030 MKS Instruments hybrid MicroPirani & piezo loadlock vacuum transducer,wide range vacuum pressure gauge,for semiconductor wafer transfer loadlock chamber pressure monitoring,flange mounted vacuum sensor.