MKS Instruments 150R40A-D01 Manual Vacuum Valve

Technical Specifications

Model：150R40A-D01 Brand：MKS Instruments Product Type: Series150 manual vacuum shut-off valve

Module Feature

MKS 150R40A-D01 belongs to Series150 manual vacuum valve with NW40 ISO-KF flange. It is manually actuated shut-off valve for vacuum pipeline isolation. Metal sealing structure, low outgassing, suitable for high purity semiconductor vacuum system. Simple and reliable mechanical structure, good leak tightness, easy maintenance. Widely used for gas manifold and vacuum chamber isolation in etch, CVD and ALD process.

Working principle: Manual rotary knob drives internal valve stem and sealing component to open or close gas flow path, realizing vacuum pipeline on-off isolation Onboard components: Manual operation knob, valve stem, metal sealing assembly, stainless steel valve body, NW40 ISO-KF flanges

LED indicatorsNo LED indicators, mechanical open/close position identification

Hardware self-diagnosis

Visual inspection for mechanical damage, vacuum leak tightness test, open-close operation test

Programming softwareNot applicable, pure mechanical manual valve

Electrical & Process ParametersActuation: Manual operation Flange size: NW40 ISO-KF Wetted material:316L stainless steel Seal:Metal seal Applicable pressure:High vacuum range

Mechanical & StructureMounting:Vacuum manifold inline mounting Protection class:IP40

EnvironmentalOperating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Series150 manual vacuum valve

System compatibilityInstalled on vacuum pipeline, matched with MKS Baratron gauge, throttle valve and MFC for semiconductor gas delivery and vacuum system isolation.

Function150R40A-D01 manual vacuum valve manufactured by MKS Instruments. It isolates vacuum pipeline manually during equipment maintenance or chamber service. All metal wetted parts minimize contamination and outgassing. Seal surface scratch or improper torque will cause vacuum leakage. It is mechanical isolation component for semiconductor vacuum gas line.

InstallationFollow lockout/tagout safety procedure before installation. Release vacuum and gas pressure. Mount valve inline on vacuum pipeline, align flow direction. Properly torque NW40 flange clamps. Complete vacuum leak test before production startup.

InterfaceNW40 ISO-KF inlet and outlet flanges, manual rotary knob on housing of 150R40A-D01.

DiagnosticVacuum leakage: Seal surface scratch or flange clamp insufficient torque. Stiff operation: Stem contamination or lack of lubrication. Cannot fully close: Foreign particle stuck on sealing face.

Product Brief150R40A-D01 MKS Instruments Series150 NW40 metal sealed manual vacuum shut-off valve,low outgassing design,for semiconductor vacuum pipeline isolation and maintenance cut-off.