MKS Instruments DLT2A2-30952 Mass Flow Ratio Controller

Technical Specifications

Model：DLT2A2-30952 Brand：MKS Instruments Product Type: DELTA II dual-channel digital mass flow ratio controller

Module Feature

MKS DLT2A2-30952 is DELTA II two-zone digital flow ratio controller. It adopts all-metal welded flow path without elastomer seals, suitable for high purity and corrosive semiconductor process gas. This unit precisely splits single incoming gas stream into two independent output channels and maintains preset flow ratio between two outlets. Fast response, outstanding repeatability and built-in comprehensive self-diagnosis. Widely used for semiconductor etch, strip and CVD process gas panel.

Working principle: Single gas inlet flows into internal thermal mass sensor and dual proportional valves, adjusts conductance of two outlets to keep target flow ratio between channel A and channel B Onboard components: Thermal mass sensing element, dual metal proportional valves, digital control PCB, all-metal manifold body, metal compression fittings, multi-pin electrical connector

LED indicatorsPower, flow active and fault LED indicators on device housing

Hardware self-diagnosis

Visual inspection, gas leak tightness test, zero and span calibration, flow ratio linearity test, dual channel closed-loop stability test

Programming software

MKS DELTA configuration software for gas recipe setup, flow ratio parameter tuning and fault log reading

Electrical & Process Parameters

Power supply:24V DC Full scale flow:20000 sccm Control interface:Digital communication + 0-10V analog I/O Wetted material:316L stainless steel all-metal seal Applicable gas:High purity corrosive and non-corrosive semiconductor specialty gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS DELTA II series flow ratio controller

System compatibility

Installed on semiconductor gas manifold, matched with MKS Baratron pressure transducers and pressure control assemblies for vacuum gas delivery system.

Function

DLT2A2-30952 is DELTA II dual-channel flow ratio controller manufactured by MKS Instruments. It measures inlet gas mass flow and dynamically adjusts two outlet valves to maintain stable flow ratio for chamber multi-zone gas distribution. All-metal flow path minimizes particle generation and outgassing. Sensor contamination or valve seat wear will cause flow ratio drift and gas leakage. It is critical component for multi-zone uniform gas delivery in semiconductor process chamber.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount DLT2A2-30952 on gas manifold following marked gas flow direction. Connect metal gas fittings and 24V DC power & signal cable. Complete leak test, zero calibration and dual channel flow ratio verification before production.

Interface

Single gas inlet and dual gas outlet metal compression fittings, multi-pin electrical connector for power, digital communication and analog signal, status LED indicators on housing of DLT2A2-30952.

Diagnostic

Flow ratio drift: Sensor contamination or one channel valve sticking. Cannot reach target flow: Supply gas pressure fluctuation or valve aging. Gas leakage: Fitting loose or metal seal damage. Communication failure: Wiring fault or control board defect.

Product Brief

DLT2A2-30952 MKS Instruments DELTA II series all-metal dual-channel mass flow ratio controller,20000sccm full scale,for semiconductor multi-zone chamber gas distribution and precise flow ratio regulation,gas panel mount flow controller.