MKS Instruments 250E-1-A Throttle Control Valve

Technical Specifications

Model：250E-1-A Brand：MKS Instruments Product Type: Type250E series servo exhaust throttle control valve

Module Feature

MKS 250E-1-A is Type250E servo exhaust throttle valve for vacuum closed-loop pressure control. It uses high precision flapper actuator for continuous conductance adjustment. Metal wetted components, low particle emission, fast response and excellent regulation stability. Cooperates with MKS Baratron gauge and pressure controller, widely deployed on etch, CVD and ALD vacuum chamber.

Working principle: Servo motor drives internal flapper assembly, continuously adjusts pumping conductance to maintain chamber pressure matching the setpoint Onboard components: Servo drive unit, flapper, position feedback sensor, stainless steel valve housing, vacuum flange fittings, multi-pin control connector

LED indicatorsPower, valve active and fault LED indicators on valve housing

Hardware self-diagnosis

Visual inspection, flapper movement test, position feedback calibration, vacuum leak tightness test, closed-loop pressure stability test

Programming software

MKS valve configuration software for parameter setup, tuning adjustment and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control signal:0-10V analog setpoint + position feedback signal Wetted material:316L stainless steel

Mechanical & Structure

Mounting:Installed between vacuum chamber and pump manifold Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type250E exhaust throttle valve

System compatibility

Works with MKS Baratron capacitance manometer and 651C pressure controller to form complete closed-loop vacuum pressure control system.

Function

250E-1-A servo exhaust throttle valve manufactured by MKS Instruments. It adjusts flapper opening dynamically according to controller command to stabilize vacuum chamber pressure. Flapper contamination or servo motor aging will lead to pressure oscillation and poor control performance. It is core regulating component for semiconductor vacuum process pressure control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum system and release residual pressure. Mount valve between chamber and vacuum pump, follow marked gas flow direction. Connect vacuum flanges and 24V DC power & signal cable. Complete leak test, position calibration and closed-loop pressure verification before production.

Interface

Vacuum inlet/outlet flange fittings, multi-pin electrical connector for power, analog control and position feedback, status LED indicators on housing of 250E-1-A.

Diagnostic

Pressure unstable: Flapper contamination or servo motor aging. Valve no movement: Power loss or control wiring disconnection. Vacuum leakage: Flange improper torque or gasket damage. Position reading abnormal: Internal position sensor drift or failure.

Product Brief

250E-1-A MKS Instruments Type250E servo exhaust throttle valve,flapper design,for semiconductor vacuum chamber closed-loop pressure regulation,vacuum pump manifold mount throttle valve.