MKS Instruments 625B11TGAEB Capacitance Manometer

Technical Specifications

Model：625B11TGAEB Brand：MKS Instruments Product Type: Type625B series absolute Baratron capacitance manometer

Module Feature

MKS 625B11TGAEB is Type625B absolute capacitance manometer with full scale 10 Torr. It uses all-welded Inconel diaphragm sensing cell, gas-independent absolute pressure measurement. High accuracy, low temperature drift and excellent long-term stability. Inconel wetted parts deliver good corrosion resistance for semiconductor mildly corrosive process gas. Widely used for pressure monitoring on etching, CVD and ALD vacuum chamber.

Working principle: Vacuum pressure deflects Inconel diaphragm and changes capacitance value, signal conditioning PCB converts capacitance variation into linear 0-10V analog output Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel housing, metal vacuum fitting, multi-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, zero & span calibration, analog output linearity test, vacuum leak tightness test

Programming software

MKS Baratron gauge diagnostic software for zero adjustment, parameter configuration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Analog output:0-10V DC Full scale pressure:10 Torr Measurement type:Absolute pressure Measurement feature:Gas composition independent Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mount on vacuum chamber via metal seal fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS Type625B Baratron manometer

System compatibility

Works with MKS pressure controller and throttle valve to build closed-loop vacuum pressure control system for semiconductor process chamber.

Function

625B11TGAEB Baratron capacitance manometer manufactured by MKS Instruments. It precisely measures absolute vacuum pressure, reading unaffected by gas type. All-welded Inconel sensor reduces corrosion risk. Diaphragm contamination or overpressure will lead to reading drift and measurement error. It is high precision pressure monitoring component for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge on vacuum port and properly torque metal fitting. Connect ±15V DC power and analog signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal vacuum process port, multi-pin D-sub connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 625B11TGAEB.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply fault or wiring disconnection. Measurement inaccurate: Diaphragm deformation caused by overpressure. Vacuum leakage: Improper torque or metal gasket damage.

Product Brief

625B11TGAEB MKS Instruments Type625B absolute Baratron capacitance manometer,10 Torr full scale,gas-independent pressure measurement,all-welded Inconel wetted parts,for semiconductor vacuum chamber high precision pressure monitoring.