MKS Instruments AS00224-032514 Mass Flow Controller

Technical Specifications

Model：AS00224-032514 Brand：MKS Instruments Product Type: Digital thermal mass flow controller

Module Feature

MKS AS00224-032514 is digital all-metal thermal mass flow controller. Fully welded metal manifold without elastomer seals, compatible with high purity and corrosive semiconductor process gases. Digital control circuit provides rapid response, high repeatability and low zero drift. Built-in self-diagnostic function for real-time status monitoring. Widely installed on etch, ALD and CVD gas delivery panels.

Working principle: Thermal mass flow sensor detects gas mass flow rate, dynamic metal proportional valve adjusts flow conductance to stabilize flow at target setpoint Onboard components: Thermal sensing element, metal proportional valve, digital control PCB, all-metal manifold, metal compression fittings, multi-pin electrical connector

LED indicatorsPower, flow active and fault LED indicators on MFC housing

Hardware self-diagnosis

Visual inspection, gas leak tightness test, zero & span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MKS configuration software for gas recipe setup, flow parameter tuning and fault log reading

Electrical & Process Parameters

Power supply:24V DC Control interface:Digital communication + 0-10V analog I/O Wetted material:316L stainless steel all-metal seal Applicable gas:High purity corrosive & non-corrosive semiconductor process gas

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS digital mass flow controller

System compatibility

Installed on semiconductor gas manifold, matched with MKS Baratron pressure transducers and throttle valves for vacuum gas delivery system.

Function

AS00224-032514 digital thermal mass flow controller manufactured by MKS Instruments. It continuously monitors and precisely controls gas mass flow. All-metal flow path minimizes particle generation and outgassing. Sensor contamination or valve seat wear will cause flow drift and gas leakage. It is high precision gas flow regulation component for advanced semiconductor process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount AS00224-032514 on gas manifold following marked flow direction. Connect metal gas fittings and 24V DC power & signal cable. Complete leak test, zero and span calibration before production startup.

Interface

Metal seal gas inlet and outlet compression fittings, multi-pin electrical connector for power, digital communication and analog signal, status LED indicators on housing of AS00224-032514.

Diagnostic

Flow reading drift: Sensor contamination or zero offset shift. Cannot reach target flow: Supply gas pressure fluctuation or valve aging. Gas leakage: Fitting loose or manifold seal damage. Communication failure: Wiring fault or control board defect.

Product Brief

AS00224-032514 MKS Instruments digital thermal mass flow controller,all-metal welded manifold design,for semiconductor high purity gas delivery panel precise gas flow regulation.