MKS Instruments 6060A-G02 Plasma Generator

Technical Specifications

Model：6060A-G02 Brand：MKS Instruments Product Type: EDGE series water-cooled solid-state RF plasma generator

Module Feature

MKS 6060A-G02 is EDGE series high-performance solid-state RF plasma generator with 60MHz output frequency. It delivers precise and stable RF power for semiconductor plasma etch process. Built-in fast arc detection, reflected power limit and over-temperature protection to protect chamber, wafer and electrode hardware. Supports pulsed power mode, low harmonic distortion and excellent process repeatability. Widely used for dielectric and metal etching vacuum chamber.

Working principle: Convert AC mains power into 60MHz RF energy, transmit high-frequency power to vacuum chamber to ignite and sustain plasma discharge Onboard components: Solid-state RF amplifier module, main control CPU board, water cooling assembly, front panel display, RF coaxial port, safety interlock and analog/digital control terminal block

LED indicatorsPower, RF active, reflected power and fault LED indicators on front panel

Hardware self-diagnosis

Visual inspection, cooling water circuit test, RF power calibration, arc & reflected power protection test, safety interlock function verification

Programming software

MKS power supply configuration software for remote power setpoint, recipe editing and fault log reading

Electrical Parameters

Output frequency:60 MHz Cooling:Water cooling Control interface:0-10V analog + digital communication Protection:Arc detection, reflected power protection, over-temperature, emergency interlock

Mechanical & Structure

Mounting:19-inch rack cabinet mounting Protection class:IP20

Environmental

Operating temperature:10℃ ~ +40℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS EDGE series RF plasma generator

System compatibility

Matched with MKS RF matching network, Baratron pressure gauges and throttle valves for semiconductor plasma etching vacuum system.

Function

6060A-G02 is solid-state RF plasma generator manufactured by MKS Instruments. It supplies controllable 60MHz RF energy to excite plasma inside vacuum chamber. Built-in protection circuit quickly cuts off RF output under arc, high reflected power and over-temperature conditions to prevent equipment damage. Cooling water failure, amplifier aging or open interlock will disable RF output and trigger process alarm. It is high-precision RF power source for advanced semiconductor etch process.

Installation

Follow lockout/tagout safety procedure before installation. Disconnect AC power supply. Rack mount unit inside electrical cabinet. Connect AC input cable, cooling water pipeline, RF coaxial cable, interlock and control wiring. Complete cooling test, RF power calibration and interlock function verification before production startup.

Interface

AC power input terminal, RF coaxial high frequency output port, multi-pin connector for analog/digital control and safety interlock, status LED indicators on front panel of 6060A-G02.

Diagnostic

No RF output: Safety interlock open or internal power supply fault. High reflected power alarm: Plasma impedance mismatch or matching network abnormality. Power unstable: Cooling water flow insufficient or RF amplifier aging. Over-temperature fault: Heat exchanger fouling or abnormal water temperature.

Product Brief

6060A-G02 MKS Instruments EDGE series water-cooled solid-state RF plasma generator,60MHz frequency,with built-in arc and reflected power protection,for semiconductor plasma etching process,19-inch rack mount RF power supply.