MKS Instruments 1179BX23CR14VS Mass Flow Controller

Technical Specifications

Model：1179BX23CR14VS PC1Brand：MKS InstrumentsProduct Type: 1179 series analog thermal mass flow controller, NSMP (Non-Stock Material)

Module Feature

MKS 1179BX23CR14VS PC1 is classic 1179 Mass-Flo analog thermal mass flow controller, equipped with Viton elastomer seal. It adopts thermal mass sensing principle, compact 3-inch standard footprint for gas panel installation. Analog 0-10V control interface, stable repeatable flow regulation. Widely applied for semiconductor non-corrosive and mildly corrosive specialty gas delivery. NSMP indicates non-standard stock part.

Working principle: Thermal flow element measures gas mass flow, proportional valve adjusts opening continuously to match target flow setpoint Onboard components: Thermal flow sensor, proportional solenoid valve, analog control PCB, metal manifold body, compression gas fittings, D-sub electrical connector

LED indicatorsPower and fault LED indicators on MFC housing

Hardware self-diagnosis

Visual inspection, gas leak tightness test, zero and span calibration, flow linearity test, closed-loop flow stability test

Programming software

MKS MFC configuration software for gas parameter selection, flow calibration and fault log reading

Electrical & Process Parameters

Power supply:±15V DC Control signal:0-10V analog I/O Seal material:Viton Wetted material:316L stainless steel Widely applicable gas:Silane and other semiconductor specialty gases

Mechanical & Structure

Mounting:Gas panel surface mounting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +50℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 1179 series analog mass flow controller

System compatibility

Installed on semiconductor gas manifold, works with MKS Baratron pressure transducers for vacuum gas delivery system.

Function

1179BX23CR14VS PC1 is analog thermal mass flow controller manufactured by MKS Instruments. It continuously monitors gas mass flow and dynamically modulates valve aperture to stabilize flow. Viton seal design suitable for silane and compatible process gas. Sensor contamination or valve sticking will lead to flow drift and gas leakage. It is mature analog MFC for legacy semiconductor gas panel.

Installation

Follow lockout/tagout safety procedure before installation. Isolate gas pipeline and release residual gas pressure. Mount 1179BX23CR14VS PC1 on gas manifold following marked flow direction. Connect gas compression fittings and ±15V DC power & analog signal cable. Complete gas leak test, zero calibration and flow verification before production.

Interface

Gas inlet/outlet compression fittings, multi-pin D-sub electrical connector for ±15V power and 0-10V analog signal, status LED indicators on housing of 1179BX23CR14VS PC1.

Diagnostic

Flow reading drift: Sensor contamination or valve sticking. Cannot reach set flow: Gas supply pressure fluctuation or valve aging. Gas leakage: Fitting loose or Viton seal aging. No output signal: Power abnormality or wiring fault.

Product Brief

1179BX23CR14VS PC1 MKS Instruments 1179 series analog thermal mass flow controller with Viton seal,NSMP non-stock part,for semiconductor specialty gas precise mass flow regulation,gas panel mount MFC.