MKS Instruments ENI ACG-6B RF Power Supply

Technical Specifications

Model：ACG-6B Brand：MKS Instruments(ENI) Product Type: ACG series air-cooled solid-state RF plasma generator

Module Feature

MKS ENI ACG-6B is air-cooled solid-state RF plasma generator originally manufactured by ENI under MKS group. Rated output power 600W at 13.56MHz. Built-in fast arc detection and reflected power protection circuit to protect target, wafer and chamber hardware. Supports constant power mode, stable RF output and low harmonic distortion. Compact 19-inch rack mount design, widely adopted for semiconductor plasma etching, sputtering and thin-film deposition process.

Working principle: Convert mains AC power into 13.56MHz RF energy, transmit high-frequency power to vacuum chamber to sustain plasma discharge Onboard components: Solid-state RF amplifier module, main control CPU board, air cooling fan, front panel display, RF coaxial port, safety interlock and analog/serial control terminal block

LED indicatorsPower, RF active, reflected power and fault LED indicators on front panel

Hardware self-diagnosisVisual inspection, cooling fan function test, RF power calibration, reflected power protection test, safety interlock verification

Programming softwareMKS power supply configuration software for remote power setpoint, recipe management and fault log reading

Electrical ParametersOutput frequency:13.56 MHz Rated output power:600W Input voltage:100~240V AC Control interface:0-10V analog I/O + serial communication Cooling:Air cooling

Mechanical & StructureMounting:19-inch rack cabinet mounting Protection class:IP20

EnvironmentalOperating temperature:10℃ ~ +40℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS ENI ACG series RF plasma generator

System compatibilityMatched with MKS RF matching network, Baratron pressure gauges and throttle valves for semiconductor plasma etching and PVD vacuum system.

FunctionACG-6B is solid-state RF plasma generator manufactured by MKS Instruments. It provides controllable 13.56MHz RF energy to excite plasma inside vacuum chamber. Built-in protection circuit quickly cuts RF output under arc and high reflected power to avoid hardware damage. Amplifier aging, fan failure or open interlock will disable RF output and trigger process alarm. It is classic legacy RF power source for semiconductor thin film process.

InstallationFollow lockout/tagout safety procedure before installation. Disconnect AC power supply. Rack mount unit inside electrical cabinet. Connect AC input cable, RF coaxial cable, interlock and control wiring. Complete cooling test, RF power calibration and interlock function verification before production startup.

InterfaceAC power input terminal, RF coaxial high frequency output port, multi-pin connector for analog/serial control and safety interlock, status LED indicators on housing of ACG-6B.

DiagnosticNo RF output: Safety interlock open or internal power supply fault. High reflected power alarm: Plasma impedance mismatch or matching network abnormality. Power unstable: Cooling fan fault or RF amplifier aging. Over-temperature alarm: Dust accumulated on heat sink or insufficient air ventilation.

Product BriefACG-6B MKS Instruments ENI ACG series air-cooled solid-state RF plasma generator,13.56MHz 600W with fast arc and reflected power protection,for semiconductor PVD sputtering and plasma etching,19-inch rack mount RF power supply.