MKS Instruments 622A12TDE Capacitance Manometer

Technical Specifications

Model：622A12TDE Brand：MKS Instruments Product Type: Type 622A unheated absolute Baratron capacitance manometer

Module Feature

MKS 622A12TDE is Type 622A compact unheated Baratron capacitance manometer with 1000 Torr full scale. It uses Inconel tensioned diaphragm, capacitance sensing principle, pressure reading is gas-independent. Integrated electronics design, high accuracy and low temperature drift. Equipped with 8VCR metal seal vacuum fitting, suitable for high purity semiconductor process gas. Widely used for pressure monitoring of semiconductor etch, PVD and CVD vacuum chamber.

Working principle: Diaphragm deflection changes capacitance value, converts vacuum pressure variation into linear 0-10V analog output signal Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, stainless steel cylindrical housing, 8VCR vacuum port, 15-pin D-sub electrical connector

LED indicatorsPower and fault LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero point adjustment, signal verification and fault log reading

Electrical & Pressure Parameters

Full scale range:1000 Torr Power supply: ±15V DC Analog output:0-10V DC Vacuum connection:8VCR female metal seal fitting

Mechanical & Structure

Mounting:Direct mounting on vacuum chamber via 8VCR fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 622A series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valves, integrated into semiconductor vacuum closed-loop pressure control system.

Function

622A12TDE is Baratron capacitance manometer manufactured by MKS Instruments. It detects absolute vacuum pressure and transmits analog feedback signal to pressure controller. Gas-independent measurement supports multiple process gases. Diaphragm contamination or overpressure impact will lead to zero drift and inaccurate pressure reading. It provides high precision pressure feedback for semiconductor vacuum process control.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge through 8VCR metal gasket, evenly torque VCR nut. Connect ±15V DC power and signal cable. Perform zero calibration and signal output verification before production.

Interface

8VCR vacuum metal sealing port,15 pin D-sub connector for power and analog signal, status LED on housing of 622A12TDE.

Diagnostic

Pressure reading drift: Diaphragm contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Inaccurate measurement: Diaphragm deformation caused by overpressure. Vacuum leakage: VCR fitting loose or metal gasket damage.

Product Brief

622A12TDE MKS Instruments Type 622A Baratron capacitance manometer,1000 Torr full scale with 8VCR connection,gas-independent vacuum pressure sensor,for semiconductor vacuum chamber high precision pressure monitoring.