MKS Instruments 625D-30518 Capacitance Manometer

Technical Specifications

Model：625D-30518 Brand：MKS Instruments Product Type: Type 625D absolute Baratron capacitance manometer with trip relays

Module Feature

MKS 625D-30518 is Type 625D Baratron capacitance manometer with 10 Torr full scale. It adopts Inconel tensioned diaphragm, capacitance sensing principle, pressure reading independent of gas type. Integrates two adjustable trip point relays for process interlock control. Corrosion resistant all-metal sensor cell, excellent long-term stability. Widely used in semiconductor etching, CVD and PVD vacuum chamber pressure monitoring.

Working principle: Diaphragm deflection changes capacitance value, converts vacuum pressure into linear 0-10V analog output, internal relays trigger at preset pressure threshold Onboard components: Inconel sensing diaphragm, capacitance sensor cell, signal conditioning PCB, relay control circuit, stainless steel cylindrical housing, vacuum port, 15-pin D-sub electrical connector

LED indicatorsPower, fault and relay status LED indicators on gauge housing

Hardware self-diagnosis

Visual inspection, diaphragm surface inspection, zero calibration test, analog output linearity test, relay trip point verification, vacuum leakage tightness test

Programming software

MKS gauge diagnostic software for zero adjustment, relay threshold setup and fault log reading

Electrical & Pressure Parameters

Full scale range:10 Torr Power supply: ±15V DC Analog output:0-10V DC Relay: 2 independent adjustable pressure trip relays Wetted material:Inconel / 316L stainless steel

Mechanical & Structure

Mounting:Direct mounting on vacuum chamber via vacuum fitting Protection class:IP40

Environmental

Operating temperature:10℃ ~ +60℃ Ambient humidity:5~95% non-condensing Certification:CE, SEMI compliant Status:MKS 625D series Baratron capacitance manometer

System compatibility

Compatible with MKS 651C vacuum pressure controller and MKS throttle valves, integrated into semiconductor vacuum closed-loop pressure control system.

Function

625D-30518 is Baratron capacitance manometer manufactured by MKS Instruments. It measures absolute vacuum pressure and sends analog signal to pressure controller. Built-in dual relay provides hardware pressure threshold interlock for process safety. Diaphragm contamination, overpressure impact will cause zero drift and inaccurate measurement. It delivers high precision pressure monitoring and safety interlock function for semiconductor vacuum process.

Installation

Follow lockout/tagout safety procedure before installation. Isolate vacuum chamber and release residual pressure. Mount gauge to vacuum port, tighten fitting evenly. Connect ±15V DC power and signal cable. Complete zero calibration and relay threshold verification before production.

Interface

Vacuum metal sealing process port,15 pin D-sub connector for power, analog signal and relay circuit, status LED indicators on housing of 625D-30518.

Diagnostic

Pressure reading drift: Sensor contamination or zero offset shift. No signal output: Power supply failure or wiring disconnection. Relay cannot trigger: Incorrect threshold parameter setting. Vacuum leakage: Vacuum fitting loose or metal gasket damaged.

Product Brief

625D-30518 MKS Instruments Type 625D Baratron capacitance manometer,10 Torr full scale with dual trip relays,gas-independent vacuum pressure measurement,for semiconductor vacuum chamber high precision pressure monitoring and safety interlock.