Parker Veriflo BFR5K150SK2PFS12FFPA Diaphragm Regulator Valve Unit

Module Feature

BFR5K150SK2PFS12FFPA is Parker Veriflo BFR series high purity diaphragm regulating valve.

It adopts all-metal diaphragm sealing structure, no internal elastomer contamination risk, ultra-low dead volume design. Wetted parts are electropolished stainless steel, suitable for inert gas, corrosive specialty gas used in semiconductor gas cabinet. It can be actuated by instrument air for remote pressure regulation, supports precise pressure control at low and medium differential pressure. This valve is widely stocked as replacement spare for semiconductor gas distribution panel.

Working principle

Pilot air signal acts on top actuator chamber, pushes the metal diaphragm and valve stem to move.

The clearance between valve seat and trim changes continuously to stabilize downstream gas pressure. Metal diaphragm provides hermetic sealing, avoiding particle generation and medium leakage. It can be configured to fail-close or fail-open upon loss of supply air for gas safety protection.

Onboard componentsEP stainless steel valve body, metal diaphragm, precision seat and trim, valve stem, actuator housing, spring assembly, compression fitting / VCR process connection interface.

LED indicators

Not applicable. Pressure reading is displayed by paired pressure transducer and local gauge.

Hardware self‑diagnosis

No built-in electronic self-diagnosis. System detects leakage, pressure drift and abnormal regulation by gas panel pressure transmitter and SIS interlock.

Programming software

Not applicable. Calibration is done by gas panel pressure loop tuning.

Electrical & Process Parameters

Model:BFR5K150SK2PFS12FFPA Brand:Parker Veriflo Device type:High purity metal diaphragm gas regulator valve Function:Precise pressure regulation for ultra-pure and specialty gas pipeline

Mechanical & Structure

Mounting:Gas panel surface mounting, compression fitting / VCR connection Protection class:IP65 Housing:Electropolished 316L stainless steel body

Environmental

Operating temperature:-20℃ ~ +80℃ Storage temperature:-40℃ ~ +85℃ Ambient humidity:5~95% non‑condensing

Certification:CE, SEMI compliant

Status:Original Parker Veriflo semiconductor gas spare

Installation

Purge pipeline completely before replacement to eliminate residual hazardous gas.

Use specified torque for VCR or compression connection, avoid scratch on sealing surface, perform helium leak test after installation.

Interface

VCR / compression process gas port, pilot air signal port, gas panel mounting interface.

Diagnostic

Pressure drift: Diaphragm fatigue, seat contamination or pilot air unstable. Internal leakage: Seat surface scratched by particle debris. No regulation response: Pilot air supply missing or stem stuck.

Product Brief

Parker Veriflo BFR5K150SK2PFS12FFPA regulator valve, high purity metal diaphragm gas regulating spare for semiconductor gas cabinet replacement.