AMAT 0190‑35278 DPS Poly Chamber Interface PCB Assembly

Technical Specifications

Model：0190‑35278

Brand：AMAT Applied Materials

Product Type：DPS Poly Chamber Interface PCB assembly

Applicable System：AMAT Centura 200mm semiconductor poly process equipment

Supply Voltage：5V,24VDC auxiliary DC power input

Interface：VME‑style edge connector,multi‑pin terminal block for chamber sensor and actuator interconnection

Common Revision：Multiple hardware revisions available

Status Indicator：On‑board LED for channel status and fault diagnosis

Built‑in Function：Chamber digital signal relay switching,interlock signal processing,actuator drive logic,process chamber status acquisition,fault signal feedback to VME main control system

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：VME card cage plug‑in installation

Weight：0.58kg

Product Brief:

0190‑35278 is legacy DPS poly chamber interface PCB assembly manufactured by AMAT Applied Materials. It is a relay‑based signal control board dedicated for Centura poly process chamber. It completes digital signal switching, interlock logic processing and status feedback between poly chamber actuators/sensors and VME main control unit. On‑board LED provides visual diagnosis for channel working and fault state. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy 200mm wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation。