AMAT 0190‑18154 RF Sensor Interface PCB Assembly

Technical Specifications

Model：0190‑18154

Brand：AMAT Applied Materials

Product Type：RF sensor interface PCB assembly

Applicable System：AMAT Centura 200mm semiconductor process equipment

Supply Voltage：5V,±12V auxiliary DC power input

Interface：Multi‑pin high‑frequency signal and power connectors for RF generator and chamber interconnection

Common Revision：Multiple hardware revisions available

Status Indicator：On‑board LED for board operating and fault status

Built‑in Function：RF power signal acquisition,high‑frequency signal conditioning,RF parameter feedback monitoring,fault signal output to host control,noise suppression for analog sensing channels

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：Chassis internal fixed installation

Weight：0.52kg

Product Brief:

0190‑18154 is legacy RF sensor interface PCB assembly manufactured by AMAT Applied Materials. It is dedicated signal acquisition and conditioning board for Centura process chamber RF monitoring subsystem. It samples RF power related sensing signals,processes high‑frequency feedback data and transmits monitoring parameters to main control unit. On‑board LED provides visual diagnosis for board running and fault state. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy 200mm wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation.