AMAT 0100‑71304 AKT 55K CVD Chamber Distribution PCB Assembly

Technical Specifications

Model：0100‑71304

Brand：AMAT Applied Materials

Product Type：AKT 55K CVD Chamber Distribution PCB assembly

Applicable System：AMAT AKT 55K large‑area substrate PECVD semiconductor equipment

Supply Voltage：24VDC auxiliary DC power input

Interface：Proprietary AKT control bus connector,multi‑pin signal terminal blocks for chamber sensor and actuator interconnection

Common Revision：REV02,multiple hardware revisions available

Status Indicator：On‑board LED for channel working condition and fault diagnostic status

Built‑in Function：Chamber multi‑group process signal distribution,actuator drive signal routing,sensor signal collection,local interlock logic processing,fault status feedback to AKT main host controller

Working Temperature：0℃ ~ +50℃

Storage Temperature：‑20℃ ~ +70℃

Protection Class：IP20

Mounting：Chassis internal fixed installation

Weight：1.30kg

Product Brief:

0100‑71304 is legacy AKT 55K CVD chamber distribution PCB assembly manufactured by AMAT Applied Materials. It serves as core signal distribution board for AKT 55K large‑area substrate PECVD process chamber. It completes signal routing and interlock signal processing between chamber actuators,sensors and main host system. On‑board LED provides visual diagnosis for channel running and fault state. This is EOL discontinued spare part,widely used for maintenance and renovation of AMAT legacy wafer fabrication tools. Please confirm hardware revision and equipment compatibility before purchase. Strict ESD anti‑static protection shall be performed during installation.